JVB 20_834.pdf (632.4 kB)
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Copyright(2002) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.The following article appeared in Journal of Vacuum Science and Technology B, 20(3),pp.834-842 ; 2002 and may be found at http://link.aip.org/link/?jvb/20/834. |
JVB 20_834.pdf
37558002-4e06-40e8-993a-296338926017
https://nitech.repo.nii.ac.jp/record/5057/files/JVB 20_834.pdf